Atomic Force Microscope (AFM), an analytical instrument that can be used to study the surface structure of solid materials, including insulators. It studies the surface structure and properties of a substance by detecting the extremely weak interatomic interaction between the surface of the sample to be tested and a micro-force sensitive element. Will be a pair of weak force extremely sensitive micro-cantilever end fixed, the other end of the small tip close to the sample, then it will interact with it, the force will make the micro-cantilever deformation or movement state changes. When scanning the sample, the sensor can be used to detect these changes, we can get the distribution of force information, so as to obtain the surface morphology of nano-resolution information and surface roughness information.★ Integrated scanning probe and sample stag enhanced the anti-interference ability. ★ Precision laser and probe positioning device make changing the probe and adjusting the spot simple and convenient. ★ By using the sample probe approaching manner,the needle could perpendicular to the sample scanning.        ★ Automatic pulse motor drive control sample probe vertical approaching, to achieve precise positioning of the scanning area. ★ Sample scanning area of interest could freely moved by using the design of high precision sample mobile device. ★ CCD observation system with optical positioning achieves real-time observation and positioning of the probe sample scan area. ★ The design of electronic control system of modularization facilitated maintenance and continuous improvement of circuit. ★ The integration of multiple scanning mode control circuit, cooperate with software system. ★ Spring suspension which simple and practical enhanced anti-interference ability.

Work mode	FM-Tapping, optional contact, friction, phase,magnetic or electrostatic
Size	Φ≤90mm,H≤20mm
Scanningrange	20 mmin XYdirection,2 mm in Z direction.
Scanningresolution	0.2nm in XY direction,0.05nm in Z direction
Movementrange of sample	±6.5mm
Pulse width ofthe motor approaches	10±2ms
Image sampling point	256×256,512×512
Optical magnification	4X
Optical resolution	2.5 mm
Scan rate	0.6Hz~4.34Hz
Scan angle	0°~360°
Scanning control	18-bit D/A in XY direction,16-bit D/A in Z direction
Data sampling	14-bitA/D,double16-bit A/D multi-channel synchronous sampling
Feedback	DSP digital feedback
Feedback sampling rate	64.0KHz
Computer interface	USB2.0
Operating environment	Windows98/2000/XP/7/8